SiNx islands

For a flexible electronic device integrating inorganic materials on a polymer substrate, the polymer can deform substantially, but the inorganic materials usually fracture at small strains.This paper describes an approach to make such a device highly stretchable.A polyimide substrate is first coated with a thin layer of an elastomer, on top of which SiNxislands are fabricated.When the substrate is stretched to a large strain, the SiNxislands remain intact.Calculations confirm that the elastomer reduces the